Fluid control device
US5975112A · kind A · utility
72Cited by
7References
4Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | May 8, 1997 |
| Grant date | Nov 2, 1999 |
| Priority date | — |
| Expiry date | May 8, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/87684
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high purity is passed through the relatively long subchannel.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.