Patent · US Expired

Micromechanical component having closely spaced apart anchoring areas for a surface structure disposed thereon

US5983721A · kind A · utility

36Cited by

3References

7Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Peter Sulzberger · Treuchtlingen, DE
Michael Offenberg · Lörrach, DE

Key dates

Filing date	Sep 29, 1997
Grant date	Nov 16, 1999
Priority date	—
Expiry date	Sep 29, 2017

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0814
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A micromechanical component includes a one-piece surface structure that is created on a substrate. The one-piece surface structure is attached to the surface of the substrate by at least two anchoring areas. The anchoring areas are a small distance apart, which is comparatively small in comparison with the lateral dimension of the surface structure. The surface structure has movable electrodes. Opposite them there are rigid electrodes that are attached to the substrate by additional anchoring areas. The additional anchoring areas also have a small distance between one another and to the anchoring areas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.