Pod loader interface
US5984610A · kind A · utility
15Cited by
14References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 7, 1995 |
| Grant date | Nov 16, 1999 |
| Priority date | — |
| Expiry date | Mar 7, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The pod loader interface is a machine that is able to automatically open a SMIF pod and unload the contents thereof. An elevator raises the SMIF cover away from its base to reveal the wafer boat contained in the SMIF pod. An articulated arm thereafter reaches through an opening in a bulkhead of the machine, securing the wafer cassette and withdrawing it through the hole in the bulkhead. The wafer cassette is then placed in position to be operated upon by the next step in the manufacturing process. The machine includes an integrated clean air system to provide a clean environment for the wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.