Micromachined Z-axis vibratory rate gyroscope
US5992233A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 31, 1996 |
| Grant date | Nov 30, 1999 |
| Priority date | — |
| Expiry date | May 31, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microfabricated gyroscope to measure rotation about an axis perpendicular to the surface of the substrate. The driving electrodes, X-axis sensing electrodes, and Y-axis sensing electrodes may all be fabricated from a signal structural layer. The gyroscope includes movable sensing electrode fingers which are positioned between paired stationary sensing electrode fingers. The position of the proof mass along the Y-axis is measured by a capacitive bridge. A voltage differential may be applied between the pairs of stationary electrode fingers to reduce the quadrature error, and a bias voltage may be applied between the movable and stationary electrode fingers to adjust the Y-axis resonant frequency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.