Inventor · Fremont, CA, US

William A. Clark

36Patents
16h-index
26Co-inventors
81Inventor score

Filing activity: May 31, 1996 → Apr 22, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US5992233A Micromachined Z-axis vibratory rate gyroscope Physics 259 Expired
US6067858A Micromachined vibratory rate gyroscope Physics 210 Expired
US6433401B1 Microfabricated structures with trench-isolation using bonded-substrates and cavities Physics 149 Expired
US6230563A Dual-mass vibratory rate gyroscope with suppressed translational acceleration response and quadrature-error correction capability Physics 127 Expired
US6296779A Method of fabricating a sensor Physics 103 Expired
US6868726B2 Position sensing with improved linearity Physics 89 Expired
US7051590B1 Structure for attenuation or cancellation of quadrature error Physics 88 Expired
US6121552A Microfabricated high aspect ratio device with an electrical isolation trench Physics 85 Expired
US6291875A Microfabricated structures with electrical isolation and interconnections Physics 85 Expired
US6386032B1 Micro-machined accelerometer with improved transfer characteristics Physics 70 Expired
US6960488B2 Method of fabricating a microfabricated high aspect ratio device with electrical isolation Physics 69 Expired
US6933873B1 PWM-based measurement interface for a micro-machined electrostatic actuator Electricity 54 Expired
US6440766B1 Microfabrication using germanium-based release masks Emerging Cross-Sectional Technologies 44 Expired
US6253612A Generation of mechanical oscillation applicable to vibratory rate gyroscopes Physics 39 Expired
US7347094B2 Coupling apparatus for inertial sensors Physics 29 Expired
US6674383B2 PWM-based measurement interface for a micro-machined electrostatic actuator Electricity 28 Expired
US8408060B2 Piezoelectric transducers and inertial sensors using piezoelectric transducers Emerging Cross-Sectional Technologies 9 Active
US6822370B2 Parallel plate electrostatic actuation of MEMS mirrors Electricity 7 Expired
US9238580B2 Spread-spectrum MEMS self-test system and method Physics 7 Active
US8421481B2 Detection and mitigation of particle contaminants in MEMS devices Electricity 6 Active
US10203352B2 Anchor tracking apparatus for in-plane accelerometers and related methods Physics 6 Active
US10168194B2 Method and apparatus for driving a multi-oscillator system Physics 5 Active
US9927459B2 Accelerometer with offset compensation Physics 4 Active
US10451454B2 Method and apparatus for driving a multi-oscillator system Physics 4 Active
US8783103B2 Offset detection and compensation for micromachined inertial sensors Physics 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.