Silicon wafer or die strength test fixture using high pressure fluid

US5992242A · kind A · utility

Assignee

• LSI Logic Corporation · US

Inventors

• Adrian Murphy · San Jose, US
• Manickam Thavarajah · San Jose, US

Key dates

• Filing date: May 4, 1998
• Grant date: Nov 30, 1999
• Expiry date: May 4, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N3/10
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An Integrated Circuit (IC) wafer test fixture includes a baseplate and a top plate. During testing, an IC wafer is positioned between the baseplate and top plate with annular rubber gaskets, forming sealed cavities above and below the IC wafer. A fluid pressure generator with a pressure gauge inserts a fluid under pressure into one of the cavities, causing the IC wafer to be subject to stress. The fluid distributes a uniform pressure load on the surface of the IC wafer. The pressure of the fluid may be gradually increased until a desired pressure is obtained or the wafer fails. The pressure at failure is recorded, and by calculation the failure stress of the IC wafer can be determined. A second embodiment of the test fixture includes a pressure vessel with a threaded sealed opening at the top and a stepped sealed opening at the bottom. The inner diameter of the insert is sized for an IC wafer. In use, the IC wafer is positioned on top of the insert, and the pressure vessel is sealed. A fluid pressure generator with a pressure gauge injects fluid under a controlled pressure within the sealed pressure chamber, stressing the IC wafer, as a uniform pressure load is distributed over the…