Patent · US Expired

Device for treating substrates in a fluid container

US5992431A · kind A · utility

31Cited by

9References

13Claims

0Family size

Assignee

Steag Micro Tech GmbH · DE

Inventors

Martin Weber · Borgo San Lazzaro, DE
John Oshinowo · Villingen-Schwenningen, DE

Key dates

Filing date	Apr 7, 1998
Grant date	Nov 30, 1999
Priority date	—
Expiry date	Apr 7, 2018

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S134/902
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A device for treating substrates includes a fluid container in which the substrates are contained during treatment. A nozzle system is connected to the sidewalls and/or bottom of the fluid container and includes a plurality of nozzles for introducing a fluid into the fluid container.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.