Fabrication method and structure for multilayer optical anti-reflection coating, and optical component and optical system using multilayer optical anti-reflection coating
US5993898A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | May 19, 1997 |
| Grant date | Nov 30, 1999 |
| Priority date | — |
| Expiry date | May 19, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C17/3417
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
An optical anti-reflection coating having multiple layers, where at least some of the layers are formed by a dry coating process and other layers are formed by a wet coating process. This combination of different types of anti-reflection layers provides superior performance in terms of low reflectance over a wide bandwidth of incident light wavelengths, and also low reflectance over a wide range of incident light angles. This is accomplished using fewer layers than would be needed using all dry process layers in the ARC. Alternatively, one may obtain an ARC having performance equivalent to that of an all dry process layer ARC but using fewer layers by using the combination of a wet process and a dry process. Furthermore, this combination of wet process and dry process layers provides a high performance anti-reflection coating which cannot be fabricated using only a dry process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.