Aluminum plug process
US5994213A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1998 |
| Grant date | Nov 30, 1999 |
| Priority date | — |
| Expiry date | Feb 9, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76882
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A new method of aluminum plug metallization in the manufacture of an integrated circuit device is described. An insulating layer is provided over the surface of a semiconductor substrate. At least one contact opening is provided through the insulating layer to the semiconductor substrate. A barrier metal layer is deposited over the surface of the insulating layer and within the contact opening. An aluminum layer is sputter deposited over the barrier metal layer and within the contact opening wherein a void is left within the contact opening. The aluminum layer is covered with a dielectric layer wherein the expansion coefficient of the dielectric layer is smaller than the expansion coefficient of the aluminum layer. The aluminum layer is reflowed using rapid thermal annealing wherein the overlying dielectric layer forces the aluminum layer to fill the contact opening completing the metallization in the fabrication of an integrated circuit device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.