Patent · US Expired

Database and method for measurement correction for cross-sectional carrier profiling techniques

US5995912A · kind A · utility

14Cited by

2References

16Claims

0Family size

Assignee

IMEC VZW · BE

Inventors

Peter Dewolf · Eeklo, BE
Trudo Clarysse · Ekeren, BE
Wilfried Vandervorst · Mechelen, BE

Key dates

Filing date	Apr 29, 1997
Grant date	Nov 30, 1999
Priority date	—
Expiry date	Apr 29, 2017

Classification

Technology area (CPC H)Electricity
CPC primaryH01L22/14
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A database method and method of using the database for determining the carrier concentration profile of a semiconductor, wherein the database includes a first set of first data, the first data being a correction factor; and a second set of second data, each of the second data including first and a second set of parameters, the first set of parameters characterizing the carrier concentration profile and the second set of parameters characterizing the measurement technique. Each data of the first set of first data is obtained from one data of the second set of data through simulation or calculation.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.