Aluminum nitride sintered body, electronic functional material, and electrostatic chuck
US5998321A · kind A · utility
15Cited by
4References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1998 |
| Grant date | Dec 7, 1999 |
| Priority date | — |
| Expiry date | Sep 14, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
This invention relates to an aluminum nitride sintered body comprising aluminum nitride crystal grains, in which the grains have a given content of a rare earth element (a conversion content as an oxide thereof), a given average grain size, and a given spin amount per unit mg of aluminum obtained from a spectrum as measured by an electron spin resonance method. The aluminum nitride sintered body is used in an electronic functional material and an electrostatic chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.