Tsuneaki Ohashi
49Patents
15h-index
39Co-inventors
81Inventor score
Filing activity: Sep 9, 1987 → Nov 12, 2010
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6160244A | Susceptors | Electricity | 541 | Expired |
| US6783875B2 | Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members | Emerging Cross-Sectional Technologies | 429 | Expired |
| US6139983A | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Emerging Cross-Sectional Technologies | 332 | Expired |
| US6239402A | Aluminum nitride-based sintered bodies, corrosion-resistant members, metal-buried articles and semiconductor-holding apparatuses | Electricity | 298 | Expired |
| US5427601A | Sintered metal bodies and manufacturing method therefor | Emerging Cross-Sectional Technologies | 51 | Expired |
| US6632549B1 | Corrosion-resistant member, wafer-supporting member, and method of manufacturing the same | Emerging Cross-Sectional Technologies | 47 | Expired |
| US6641941B2 | Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation | Emerging Cross-Sectional Technologies | 45 | Expired |
| US7138192B2 | Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5514347A | Honeycomb structure and a method of making same | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6051303A | Semiconductor supporting device | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6204489A | Electrically heated substrate with multiple ceramic parts each having different volume restivities | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6261708A | Joined body of aluminum nitride series ceramics, method of joining aluminum nitride series ceramics and joining agent | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6328198A | Method of manufacturing joint body | Chemistry; Metallurgy | 17 | Expired |
| US5998321A | Aluminum nitride sintered body, electronic functional material, and electrostatic chuck | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6486084B2 | Composite material and method of producing the same | Chemistry; Metallurgy | 15 | Expired |
| US6447626B1 | Method for producing joined body of ALN substrates and joining agent used for the joining | Chemistry; Metallurgy | 13 | Expired |
| US4925816A | Novel solid solution, heat-resistant sintered body and method of producing the same | Chemistry; Metallurgy | 12 | Expired |
| US7019956B2 | Electrostatic chuck having bonded structure and method of manufacturing the same | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6756132B2 | Joined structures of metal terminals and ceramic members, joined structures of metal members and ceramic members, and adhesive materials | Emerging Cross-Sectional Technologies | 12 | Expired |
| US6028022A | Method for producing joined body of a1n substrates and joining agent used for the joining | Chemistry; Metallurgy | 11 | Expired |
| US6268069A | Joined articles and a process for producing such joined articles | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6156686A | Porous composite ceramic sintered bodies and a production process thereof | Electricity | 9 | Expired |
| US5445786A | Heat-resistant metal monolith and manufacturing method therefor | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6436545B1 | Joint body of ceramic member and metal member and method of producing the same | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6294771A | Electrically heated substrate with multiple ceramic parts each having different volume resitivities | Emerging Cross-Sectional Technologies | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.