Compensated oil-filled pressure transducers
US5999082A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 1998 |
| Grant date | Dec 7, 1999 |
| Priority date | — |
| Expiry date | Mar 25, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L19/147
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure transducer employing a metal isolation diaphragm. A volume of oil is located between the metal diaphragm and a silicon sensor received in a base member. In order to reduce errors at very low pressure caused by the oil exerting a tension on the deflecting portion of said silicon sensor, the metal diaphragm has an extending dome or dimple above the location of the silicon sensor. The silicon sensor is also recessed below the supporting base plate so that the separation between the silicon sensor and the metal diaphragm increases. The base plate also contains a series of shallow, narrow concentric grooves which further reduces surface tension between the metal diaphragm and the base plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.