One-dimensional active alignment of optical or opto-electronic devices on a substrate
US5999269A · kind A · utility
8Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 9, 1996 |
| Grant date | Dec 7, 1999 |
| Priority date | — |
| Expiry date | Feb 9, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S5/4031
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention involves a combination of active and passive optical or opto-electronic device alignment techniques. Passive alignment is used for two axial lateral directions and all three axial rotational directions (yaw, pitch and roll). In such passive alignment, only the substrate is micromachined with passive alignment structures. One-dimensional active alignment is then used for the remaining axial lateral direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.