Substrate holding device and exposing apparatus using the same
US5999589A · kind A · utility
13Cited by
15References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 26, 1998 |
| Grant date | Dec 7, 1999 |
| Priority date | — |
| Expiry date | Aug 26, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/11
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate holding device includes a vacuum supplying device for supplying a vacuum to a holding surface to hold a substrate, a hollow member surrounding at least a portion of the holding surface and movable between a position in which the holding member protrudes from the holding surface and a position in which the hollow member does not protrude from the holding surface, and a moving mechanism for relatively moving between the hollow member and the holding surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.