Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal
US6000415A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | May 12, 1997 |
| Grant date | Dec 14, 1999 |
| Priority date | — |
| Expiry date | May 12, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/0318
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
Apparatus, positioned at an inlet port to a pump, for shielding the pump from a process chamber of a semiconductor wafer processing system, where the apparatus has a controllably variable effective throughput area, and method for electrically controlling the size of the effective throughput area. Specifically, the apparatus is a controllable restrictor shield supported by an actuator, having a first effective throughput area and a second effective throughput area, where the first effective throughput area is typically less than the second effective throughput area. The size of the effective throughput area is directly responsive to an electric signal that controls the actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.