Method for polishing a composite comprising an insulator, a metal, and titanium
US6001269A · kind A · utility
28Cited by
3References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 20, 1997 |
| Grant date | Dec 14, 1999 |
| Priority date | — |
| Expiry date | May 20, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/3212
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
A process is provided for polishing a composite comprised of an insulating layer, a metal and titanium in which the composite is polished in a standard polishing machine using an aqueous slurry comprising submicron abrasive particles, an iodate, and a peroxide. Another process is provided in which peroxide is added to the aqueous slurry only when a titanium or titanium nitride layer is being polished. Further the invention also comprises the addition of a base to the slurry stream exiting the polishing machine to bring the pH of the used slurry to about 7 or higher.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.