Inventor · Wilmington, DE, US

Guangwei Wu

10Patents
4h-index
12Co-inventors
53Inventor score

Filing activity: May 20, 1997 → Jun 30, 2014

Most-cited inventions

PatentTitleAreaCited byStatus
US5770103A Composition and method for polishing a composite comprising titanium Electricity 41 Expired
US6001269A Method for polishing a composite comprising an insulator, a metal, and titanium Electricity 28 Expired
US9162341B2 Chemical-mechanical planarization pad including patterned structural domains Performing Operations; Transporting 15 Active
US8684794B2 Chemical mechanical planarization pad with void network Performing Operations; Transporting 15 Active
US7118461B2 Smooth pads for CMP and polishing substrates Performing Operations; Transporting 3 Expired
US8758659B2 Method of grooving a chemical-mechanical planarization pad Performing Operations; Transporting 1 Active
US9796063B2 Multi-layered chemical-mechanical planarization pad Performing Operations; Transporting 0 Active
US8435099B2 Chemical-mechanical planarization pad including patterned structural domains Performing Operations; Transporting 0 Active
US8790165B2 Multi-layered chemical-mechanical planarization pad Performing Operations; Transporting 0 Active
US8377351B2 Polishing pad with controlled void formation Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.