Substrate transport apparatus
US6002840A · kind A · utility
73Cited by
10References
11Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 30, 1997 |
| Grant date | Dec 14, 1999 |
| Priority date | — |
| Expiry date | Sep 30, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/141
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate transport apparatus comprising a robot transport arm and a substrate aligner located on the robot transport arm.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.