Method for cleaning a semiconductor structure
US6004401A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 2, 1998 |
| Grant date | Dec 21, 1999 |
| Priority date | — |
| Expiry date | Mar 2, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/86348
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A shielding apparatus and method of use for preventing premature entry of a liquid into an overflow drain tube. The shielding apparatus has a shielding member, which may be convex, positioned over an opening of the overflow drain tube. The shielding member deflects airborne liquid and prevents the airborne liquid from passing through the opening. The shielding apparatus also has at least one stem that is inserted through the opening and into the bore of the overflow drain tube. At least one spacer provides a space between at least a portion of the shielding member and a rim that surrounds the opening. The shielding apparatus may be used in a system for cleaning semiconductor structures by preventing liquid from being splashed or projected into the opening of the overflow drain tube. Methods for shielding an overflow drain tube and for cleaning semiconductor structures are also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.