Patent · US Expired

Semiconductor cell array with high packing density

US6005271A · kind A · utility

113Cited by
1References
19Claims
0Family size

Assignee

Inventor

Key dates

Filing dateNov 5, 1997
Grant dateDec 21, 1999
Priority date
Expiry dateNov 5, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/519

Abstract

A MOSFET (Metal Oxide Semiconductor Field Effect Transistors) cell array formed on a semiconductor substrate includes a major surface formed with a plurality of MOSFET cells. Each semiconductor cell in the cell array is geometrically configured with a base portion and a plurality of protruding portions extending from the base portion. The base and protruding portions define a closed cell boundary enclosing each semiconductor cell. The closed cell boundary of each semiconductor cell is disposed on the major surface proximal to and in geometrical accord with the corresponding cell boundaries of other adjacent semiconductor cells in the cell array. As arranged, the cell boundary and thus the channel width of each cell is extended without any concomitant reduction in cell area.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.