Pickup chuck with an integral heatsink
US6019166A · kind A · utility
43Cited by
11References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 1997 |
| Grant date | Feb 1, 2000 |
| Priority date | — |
| Expiry date | Dec 30, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A pickup chuck having a heat slug for removing heat from a heat generating device that is held within the pickup chuck.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.