Aspect ratio program for optimizing semiconductor chip shape
US6021267A · kind A · utility
2Cited by
16References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 1997 |
| Grant date | Feb 1, 2000 |
| Priority date | — |
| Expiry date | Sep 8, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70425
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A cost-based algorithm determines semiconductor chip aspect ratios which minimize lithographic processing costs and determines optimum chip matrices for various types of lithographic tools.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.