Container of coolant
US6021669A · kind A · utility
0Cited by
7References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 1998 |
| Grant date | Feb 8, 2000 |
| Priority date | — |
| Expiry date | May 7, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F23/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A container of coolant used in a NIKON.TM. stepper is utilizing a transparent duct mounted on a side of the container of coolant to check a liquid level. The container of coolant can be conventional or other similar container of coolant.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.