Patent · US Expired

Container of coolant

US6021669A · kind A · utility

0Cited by
7References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 7, 1998
Grant dateFeb 8, 2000
Priority date
Expiry dateMay 7, 2018

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01F23/02
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A container of coolant used in a NIKON.TM. stepper is utilizing a transparent duct mounted on a side of the container of coolant to check a liquid level. The container of coolant can be conventional or other similar container of coolant.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.