Point-of-use vaporization system and method
US6022416A · kind A · utility
5Cited by
3References
30Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 23, 1998 |
| Grant date | Feb 8, 2000 |
| Priority date | — |
| Expiry date | Apr 23, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4481
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A point-of-use vaporization system for use in Chemical Vapor Deposition having a first delivery member for delivering a liquid precursor to a vaporization point, a second delivery member for separately delivering a solvent to the vaporization point, and a frit for vaporizing the precursor and solvent at the vaporization point.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.