Linear motor, and stage apparatus and exposure apparatus using the same
US6025658A · kind A · utility
13Cited by
4References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 28, 1997 |
| Grant date | Feb 15, 2000 |
| Priority date | — |
| Expiry date | Apr 28, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02K41/03
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In order to provide a good linear motor device which can enjoy low cost and high driving power but has small thrust ripples, in a linear motor in which permanent magnets move relative to a coil, a plurality of permanent magnets are arranged along the moving direction while rotating their polarity directions 90.degree. each in turn to generate a sine magnetic field. Each permanent magnet has a simple rectangular parallelopiped shape, and two or more coils of a polyphase coil are simultaneously energized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.