Shigeto Kamata
19Patents
8h-index
19Co-inventors
65Inventor score
Filing activity: Oct 3, 1994 → Aug 6, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6084319A | Linear motor, and stage device and exposure apparatus provided with the same | Electricity | 75 | Expired |
| US5701041A | Weight supporting apparatus | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6043572A | Linear motor, stage device, and exposing device | Electricity | 17 | Expired |
| US6025658A | Linear motor, and stage apparatus and exposure apparatus using the same | Electricity | 13 | Expired |
| US6741087B2 | Voltage-applying probe, apparatus for manufacturing electron source using the probe, and method for manufacturing electron source using the apparatus | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5703420A | Moving magnet type multi-phase linear motor with vibration suppression and coil cooling means | Electricity | 12 | Expired |
| US7039303B2 | Heating method, heating apparatus, and production method of image display apparatus | Mechanical Engineering; Lighting; Heating | 8 | Expired |
| US6639333B1 | Linear motor stage system for use in exposure apparatus | Electricity | 8 | Expired |
| US6347535B2 | Heating apparatus and method | Chemistry; Metallurgy | 7 | Expired |
| US7110665B2 | Thermal treatment equipment, thermal treatment method and manufacturing method of image display apparatus | Electricity | 6 | Expired |
| US7383875B2 | Heating/cooling method, manufacturing method of image displaying apparatus, heating/cooling apparatus, and heating/cooling processing apparatus | Electricity | 5 | Expired |
| US7972461B2 | Hermetically sealed container and manufacturing method of image forming apparatus using the same | Emerging Cross-Sectional Technologies | 5 | Active |
| US6962516B2 | Voltage applying apparatus, and apparatus and method for manufacturing electron source | Electricity | 4 | Expired |
| US7126087B2 | Method of effecting heating and cooling in reduced pressure atmosphere | Mechanical Engineering; Lighting; Heating | 3 | Expired |
| US7226331B2 | Electron source manufacturing apparatus and electron source manufacturing method | Electricity | 2 | Expired |
| US6937041B2 | Method for manufacturing a substrate and a display device | Emerging Cross-Sectional Technologies | 1 | Expired |
| US8115391B2 | Hermetic envelope and image display apparatus using the same | Electricity | 1 | Active |
| US7445535B2 | Electron source producing apparatus and method | Electricity | 0 | Expired |
| US7972191B2 | Manufacturing method of image display apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.