Shape measuring apparatus and method
US6026583A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 1997 |
| Grant date | Feb 22, 2000 |
| Priority date | — |
| Expiry date | Dec 10, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A shape measuring apparatus includes an object measuring device, a holding base, a reference plane measuring device, and a length measuring unit. The holding base holds an object-to-be-measured on its surface and has a reference plane provided on its back side so that a measured surface of the object and the reference plane can be simultaneously scanned by the object measuring device and the reference plane measuring device, respectively. Therefore, the object and the reference plane can sway integrally with each other, and the accuracy of measurement of the measured surface is not influenced by any moving straightness deviation of the holding base unless any change occurs in relative positions of the reference plane and the measured surface. Therefore, the shape of the measured surface can be measured with the flatness accuracy of the reference plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.