Method for producing joined body of a1n substrates and joining agent used for the joining
US6028022A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 30, 1997 |
| Grant date | Feb 22, 2000 |
| Priority date | — |
| Expiry date | Sep 30, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC04B2237/80
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
A novel method for joining aluminum nitride-series substrates to each other is provided in the substantial absence of an intervening third layer at the joining interface between the substrates. In the method, the aluminum nitride-series substrates are joined to each other by interposing a joining agent between the substrates, heating the substrates and the joining agent to a first temperature range of at least the melting point of the joining agent to melt the joining agent and liquefy particles of the aluminum nitride at the neighborhood of the interfaces between the melted joining agent and the substrates, and then heating the joining agent and the substrates to a temperature range higher than the temperature range of the first process but lower than the melting point of the substrates to exhaust the joining agent from between the substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.