Air-guage nozzle probe structure for microlithographic image focusing

US6029361A · kind A · utility

Assignee

• Ultratech Stepper, Inc. · US

Inventor

• Thomas H. Newman · Midland, US

Key dates

• Filing date: Mar 25, 1998
• Grant date: Feb 29, 2000
• Expiry date: Mar 25, 2018

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S33/02
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An air-probe structure of an air-gauge nozzle that defines an air-probe bore having an elongated, relatively small-area output tip (e.g., 0.3.times.1.3 millimeters) situated at the air-probe structure's output end. Such an air-gauge nozzle is useful in controlling the distance between the bore's output tip and a rowbar workpiece (employed in an optical microlithographic pole trimming step of the fabrication process for thin-film heads) in accordance with the air pressure measured by the air gauge. The air-probe structure's output end preferably also comprises a relatively large-area protective manifold (e.g., 6.times.7 millimeters) surrounding the elongated, relatively small-area output tip. This manifold, which protects the bore's output tip from damage which would otherwise result from inadvertent contact between the rowbar and the bore's elongated, small-area output tip, includes a set of interconnected channels to provide an escape route for air emerging from the bore's output tip and thereby prevent back pressure from being produced in the air-probe bore in response to the output end of said air-probe structure being situated in close proximity to the rowbar. A protective mani…