Miniaturized accelerometer of the type using spring compensation of the effect of gravity and its production process
US6029517A · kind A · utility
7Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 2, 1998 |
| Grant date | Feb 29, 2000 |
| Priority date | — |
| Expiry date | Jun 2, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a miniaturized accelerometer of the type with spring compensation of the gravity effect. The accelerometer seismic mass (1), its support and the compensating spring (2) are produced in the same substrate (10), regulating means being provided for placing the spring under mechanical tension.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.