Integrated circuit insulator and method
US6030706A · kind A · utility
17Cited by
7References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 6, 1997 |
| Grant date | Feb 29, 2000 |
| Priority date | — |
| Expiry date | Nov 6, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/31692
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A intermetal level dielectrics with copolymers of parylene and cyclic siloxances (432, 482) between metal lines plus oxides (450, 490), and vapor deposition method for the copolymerization. Fluorination of the copolymers lowers dielectric constant and increases working temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.