Method for producing a heat spreader and semiconductor device with a heat spreader
US6032362A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | May 1, 1998 |
| Grant date | Mar 7, 2000 |
| Priority date | — |
| Expiry date | May 1, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12917
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A heat spreader for a semiconductor device is constituted by an integral laminate of alternatingly stacked and diffusion-bonded Fe--Ni alloy sheets and copper-group metal sheets, the laminate having a one-directional stripe pattern of the Fe--Ni alloy sheets and the copper-group metal sheets, which appears on a planar surface on which a silicon chip is disposed. It is produced by (a) alternatingly stacking Fe--Ni alloy sheets and copper-group metal sheets, (b) hot isostatic-pressing the resulting stack of the metal sheets to form a slab, (c) rolling the slab vertically to the laminating direction of the metal sheets to form an integrated stripe-pattern laminate, and (d) cutting the integrated stripe-pattern laminate to a predetermined shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.