Process for producing thin films of oxide ceramic
US6037002A · kind A · utility
4Cited by
5References
3Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 14, 1998 |
| Grant date | Mar 14, 2000 |
| Priority date | — |
| Expiry date | Jul 14, 2018 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/40
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for producing thin films of oxide ceramic by deposition of metal oxides on a surface. An accelerator is added to initiate oxidation of organometallic precursors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.