Multiple device test layout

US6037795A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Ronald G. Filippi · Wappingers Falls, US
• James J. Poulin · Poughquag, US
• Robert D. Raviart · Poughkeepsie, US
• Kenneth P. Rodbell · Sandy Hook, US
• Richard G. Smith · North Aurora, US
• Timothy D. Sullivan · Batavia, US
• Alexander J. Swinton · Hopewell Junction, US

Key dates

• Filing date: Sep 26, 1997
• Grant date: Mar 14, 2000
• Expiry date: Sep 26, 2017

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A test layout increases the sample size of electromigration experiments. Through pad sharing, the number of structures tested can be increased, allowing hundreds of identical structures to be tested in a single high temperature oven door.