Current waveform analysis for testing semiconductor devices
US6037796A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 1997 |
| Grant date | Mar 14, 2000 |
| Priority date | — |
| Expiry date | Jun 25, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/3004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of testing a semiconductor device includes generating a current waveform for the semiconductor device by measuring the response of the device to an initializing vector group and comparing the current waveform to a golden waveform to determine whether the semiconductor device is good or defective. Apparatus for testing the semiconductor device includes a vector generator providing an initialization vector group to the semiconductor device, a measurement unit for measuring a plurality of current measurements from the semiconductor device which responds to the input of the initialization vector group, a generation unit for generating a current waveform from the current measurements of the semiconductor device, and an analysis unit for comparing the current waveform to a golden waveform to determine whether the device falls outside a tolerance margin of the golden waveform.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.