Method for making field effect transistors having sub-lithographic gates with vertical side walls
US6040214A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 19, 1998 |
| Grant date | Mar 21, 2000 |
| Priority date | — |
| Expiry date | Feb 19, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D64/517
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method for the formation of field effect transistors (FETs), and more particularly metal oxide field effect transistors (MOSFETs), comprising the steps of: forming a dielectric stack on a semiconductor structure; defining an etch window on the dielectric stack; defining a gate hole in the dielectric stack by transferring the etch window into the dielectric stack using a reactive ion etching (RIE) process; depositing a side wall layer; removing the side wall layer from horizontal surfaces of the dielectric stack and gate hole such that side wall spacers remain which reduce the lateral size of the gate hole; depositing a gate conductor such that it fills the gate hole; removing the gate conductor covering the portions of the semiconductor structure surrounding the gate hole; removing at least part of the dielectric stack; and removing the side wall spacers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.