Semiconductor tester system including test head supported by wafer prober frame
US6040700A · kind A · utility
52Cited by
3References
14Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 15, 1997 |
| Grant date | Mar 21, 2000 |
| Priority date | — |
| Expiry date | Sep 15, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2851
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a semiconductor tester system including a wafer prober, the entire weight of the test head assembly is carried by the wafer prober frame. In one embodiment, a probe card is releasably attached to the test head assembly through a ring carrier and the probe tips are planarized during initial installation. In another embodiment, the probe card is attached directly to the test head assembly and the probe tips are planarized each time the probe card is changed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.