Thermal mass flow controller having orthogonal thermal mass flow sensor
US6044701A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 1997 |
| Grant date | Apr 4, 2000 |
| Priority date | — |
| Expiry date | Mar 10, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal mass flow controller having a thermal mass flow meter with an orthogonal thermal mass flow sensor includes a base defining a primary fluid flow path therein for carrying a flow of fluid to be metered. A pressure dropping bypass is positioned in the primary fluid flow path. A flow measuring portion of a thermal mass flow sensor is oriented substantially transversely or orthogonally with respect to and is in communication with the primary fluid flow path. The flow measuring portion includes a portion of an electrical bridge for determining a temperature of the sensor and produces a mass flow rate signal in response thereto. A valve is connected to an outlet of the primary flow path to control the flow of fluid in response to the mass flow rate signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.