SOG coater nozzle pot
US6048399A · kind A · utility
1Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 21, 1998 |
| Grant date | Apr 11, 2000 |
| Priority date | — |
| Expiry date | May 21, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05C11/10
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A SOG coater nozzle pot includes a pot for containing fluid and letting the fluid in the pot flow out, a funneled nozzle including a wider opening for receiving fluid from the pot and a narrower opening on a protuberance inserted into a duct, and a mounting device for mounting the funneled nozzle on the SOG coater. The nozzle pot according to the invention makes the mounting/dismounting operations of the pot more convenient and less time-consuming. The stability of the SOG coater is maintained as well.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.