Illumination optical apparatus with optical integrator
US6051842A · kind A · utility
20Cited by
6References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 9, 1998 |
| Grant date | Apr 18, 2000 |
| Priority date | — |
| Expiry date | Jan 9, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70358
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An illumination optical apparatus includes a light source emitting an illumination light beam, the illumination light beam being directed along a predetermined optical path, a variable optical filter disposed on the predetermined optical path of the illumination light beam for controlling the intensity of the illumination light beam, a transmissivity of the variable optical filter with respect to the illumination light beam being continuously variable, and an optical integrator receiving the illumination light beam that has passed through the variable optical filter to form a plurality of images of the light source.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.