Wafer hoist with self-aligning bands
US6053478A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 15, 1998 |
| Grant date | Apr 25, 2000 |
| Priority date | — |
| Expiry date | Jul 15, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68792
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A hoist system including a roller assembly which is allowed to pivot as a suspending member is rolled up around a drum compensates for lateral forces and allows a load on the suspending member to remain centered under the roller assembly. The drum has a shaft mounted through the center with a resilient coupling between the shaft and the drum which allows transfer of rotational torque while allowing the drum to pivot. Such a coupling can be furnished by a pair of concentric rings around the shaft having pivot holes orthogonal to the shaft axis. The innermost ring is connected by a pair of pivot pins to the shaft. The outermost ring is connected to the innermost ring by another pair of pivot pins perpendicular to the pivot pins through the shaft. The outermost ring is attached to the inside of the drum. The drum and outermost ring are allowed to pivot around the axis through pivot pins in the outermost ring, and the drum, outermost ring and innermost ring are allowed to pivot around the perpendicular axis through the pivot pins in the shaft.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.