Patent assignee · US · COMPANY

PRI Automation, Inc.

🏢 View company profile →
30Patents
0Active
30Granted
39Portfolio score

Filing activity: May 22, 1996 → Apr 29, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US5970621A Semiconductor wafer cassette positioning and detection mechanism Emerging Cross-Sectional Technologies 467 Expired
US6562094B2 Reticle storage and retrieval system Emerging Cross-Sectional Technologies 349 Expired
US6397990B1 Materials transport system having inductive power transfer Electricity 91 Expired
US6285951A Dynamic traffic based routing algorithm Physics 75 Expired
US6711731B2 Web based tool control in a semiconductor fabrication facility Electricity 68 Expired
US6265851A Ultracapacitor power supply for an electric vehicle Emerging Cross-Sectional Technologies 59 Expired
US5615988A Wafer transfer system having rotational capability Emerging Cross-Sectional Technologies 44 Expired
US6647316B2 Traffic management system and method for materials handling using traffic balancing and traffic density Physics 42 Expired
US6686823B2 Inductive power transmission and distribution apparatus using a coaxial transformer Performing Operations; Transporting 31 Expired
US5741109A Wafer transfer system having vertical lifting capability Emerging Cross-Sectional Technologies 26 Expired
US6443686B1 Material handling and transport system and process Emerging Cross-Sectional Technologies 25 Expired
US6454512B1 Person-guided vehicle Emerging Cross-Sectional Technologies 24 Expired
US5673804A Hoist system having triangular tension members Electricity 21 Expired
US6623235B2 Robot arm edge gripping device for handling substrates using two four-bar linkages Electricity 20 Expired
US5647718A Straight line wafer transfer system Emerging Cross-Sectional Technologies 19 Expired
US6106213A Automated door assembly for use in semiconductor wafer manufacturing Emerging Cross-Sectional Technologies 18 Expired
US6290188A Collision avoidance system for track-guided vehicles Performing Operations; Transporting 15 Expired
US6452503B1 Semiconductor wafer imaging system Emerging Cross-Sectional Technologies 13 Expired
US6273237A Rotating shuttle payload platform Performing Operations; Transporting 12 Expired
US6520726B1 Apparatus and method for using a robot to remove a substrate carrier door Emerging Cross-Sectional Technologies 10 Expired
US6165268A Wafer carrier adapter and method for use thereof Emerging Cross-Sectional Technologies 8 Expired
US6278201A Power sharing among multiple power supplies in a material handling system Electricity 6 Expired
US6405843B1 Self supporting cable for use with linear motion devices Electricity 6 Expired
US6913302B2 Robot arm edge gripping device for handling substrates Emerging Cross-Sectional Technologies 6 Expired
US6053478A Wafer hoist with self-aligning bands Electricity 4 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.