PRI Automation, Inc.
🏢 View company profile →30Patents
0Active
30Granted
39Portfolio score
Filing activity: May 22, 1996 → Apr 29, 2002
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5970621A | Semiconductor wafer cassette positioning and detection mechanism | Emerging Cross-Sectional Technologies | 467 | Expired |
| US6562094B2 | Reticle storage and retrieval system | Emerging Cross-Sectional Technologies | 349 | Expired |
| US6397990B1 | Materials transport system having inductive power transfer | Electricity | 91 | Expired |
| US6285951A | Dynamic traffic based routing algorithm | Physics | 75 | Expired |
| US6711731B2 | Web based tool control in a semiconductor fabrication facility | Electricity | 68 | Expired |
| US6265851A | Ultracapacitor power supply for an electric vehicle | Emerging Cross-Sectional Technologies | 59 | Expired |
| US5615988A | Wafer transfer system having rotational capability | Emerging Cross-Sectional Technologies | 44 | Expired |
| US6647316B2 | Traffic management system and method for materials handling using traffic balancing and traffic density | Physics | 42 | Expired |
| US6686823B2 | Inductive power transmission and distribution apparatus using a coaxial transformer | Performing Operations; Transporting | 31 | Expired |
| US5741109A | Wafer transfer system having vertical lifting capability | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6443686B1 | Material handling and transport system and process | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6454512B1 | Person-guided vehicle | Emerging Cross-Sectional Technologies | 24 | Expired |
| US5673804A | Hoist system having triangular tension members | Electricity | 21 | Expired |
| US6623235B2 | Robot arm edge gripping device for handling substrates using two four-bar linkages | Electricity | 20 | Expired |
| US5647718A | Straight line wafer transfer system | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6106213A | Automated door assembly for use in semiconductor wafer manufacturing | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6290188A | Collision avoidance system for track-guided vehicles | Performing Operations; Transporting | 15 | Expired |
| US6452503B1 | Semiconductor wafer imaging system | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6273237A | Rotating shuttle payload platform | Performing Operations; Transporting | 12 | Expired |
| US6520726B1 | Apparatus and method for using a robot to remove a substrate carrier door | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6165268A | Wafer carrier adapter and method for use thereof | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6278201A | Power sharing among multiple power supplies in a material handling system | Electricity | 6 | Expired |
| US6405843B1 | Self supporting cable for use with linear motion devices | Electricity | 6 | Expired |
| US6913302B2 | Robot arm edge gripping device for handling substrates | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6053478A | Wafer hoist with self-aligning bands | Electricity | 4 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.