Method and apparatus for loading and unloading wafers from a wafer carrier
US6053688A · kind A · utility
Inventor
Key dates
| Filing date | Aug 25, 1997 |
| Grant date | Apr 25, 2000 |
| Priority date | — |
| Expiry date | Aug 25, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53022
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer handling apparatus and method includes a wafer carrier station for supporting a wafer carrier, such as an enclosed pod, that holds one or more wafers. A grounded interface panel is provided between the carrier station and a clean testing or processing environment. A z-movement mechanism moves the carrier station and the wafer carrier in a z-direction. A door opening mechanism removes a door from said carrier through a door opening in the interface panel. A handler mechanism includes a wafer holding device, such as a flat end effector, that moves into the wafer carrier at a separate access opening to load or unload a wafer to or from the wafer carrier. Wafer carriers holding different amounts of wafers can be used with no major structural changes to the apparatus.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.