Wafer scrubbing machine
US6055694A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Nov 30, 1998 |
| Grant date | May 2, 2000 |
| Priority date | — |
| Expiry date | Nov 30, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/138
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A wafer scrubbing machine is provided with a network of wafer holders which can be moved from a retracted position adjacent each other at a wafer receiving station to an expanded position spaced apart from each within a scrubbing station. The wafers are picked up simultaneously by pairs of depending arms in the scrubbing station and passed between pairs of rotating brushes for cleaning purposes. A common drive wheel is provided to rotate the wafers simultaneously during scrubbing between the brushes. A second network of wafer holders is provided to receive the scrubbed wafers in the scrubbing station and to move into a retracted position within a delivery station for transfer of the cleaned wafers into a cassette for subsequent processing. Two sets of networks may be provided on a common rotatable assembly in order to accommodate two different sizes of delivered wafers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.