TSK America
5Patents
0Active
5Granted
27Portfolio score
Filing activity: Nov 30, 1998 → Oct 15, 2001
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6055694A | Wafer scrubbing machine | Emerging Cross-Sectional Technologies | 29 | Expired |
| US6271676A | Spiral chuck | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6290274A | Vacuum system and method for securing a semiconductor wafer in a planar position | Emerging Cross-Sectional Technologies | 13 | Expired |
| US6306016A | Wafer notch polishing machine and method of polishing an orientation notch in a wafer | Performing Operations; Transporting | 10 | Expired |
| US6494775B1 | Wafer carrier having more support ribs and lighter weight and method | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.