Arc resistant high voltage micromachined electrostatic switch
US6057520A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jun 30, 1999 |
| Grant date | May 2, 2000 |
| Priority date | — |
| Expiry date | Jun 30, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2059/0081
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A MEMS (Micro Electro Mechanical System) electrostatically operated device is provided that can switch high voltages while providing improved arcing tolerance. The MEMS device comprises a microelectronic substrate, a substrate electrode, first and second contact sets, an insulator, and a moveable composite. The moveable composite overlies the substrate and substrate electrode. In cross section, the moveable composite comprises an electrode layer and a biasing layer. In length, the moveable composite comprises a fixed portion attached to the underlying substrate, a medial portion, and a distal portion moveable with respect to the substrate electrode. Each contact set has at least one composite contact attached to the moveable composite, and preferably at least one substrate contact attached to the substrate. One of the contact sets is closer to the composite distal portion. The distal and/or medial portions of the moveable composite are biased in position when no electrostatic force is applied. Applying a voltage between the substrate electrode and moveable composite electrode creates an electrostatic force that attracts the moveable composite to the underlying substrate. The first …
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.