Laser-ultrasound spectroscopy apparatus and method with detection of shear resonances for measuring anisotropy, thickness, and other properties
US6057927A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 25, 1998 |
| Grant date | May 2, 2000 |
| Priority date | — |
| Expiry date | Feb 25, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/0422
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and method for detecting shear resonances includes structure and steps for applying a radiation pulse from a pulsed source of radiation to an object to generate elastic waves therein, optically detecting the elastic waves generated in the object, and analyzing the elastic waves optically detected in the object. These shear resonances, alone or in combination with other information, may be used in the present invention to improve thickness measurement accuracy and to determine geometrical, microstructural, and physical properties of the object. At least one shear resonance in the object is detected with the elastic waves optically detected in the object. Preferably, laser-ultrasound spectroscopy is utilized to detect the shear resonances.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.