Photo-sensor fiber-optic stress analysis system
US6058160A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 1, 1998 |
| Grant date | May 2, 2000 |
| Priority date | — |
| Expiry date | Sep 1, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/20041
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An x-ray diffraction system for determining stress in integrated circuit materials includes a source of x-rays (3) that are directed toward a sample holding mechanism for diffracting from the test sample (8). An x-ray detector (14) is arranged for detecting high back reflected diffracted x-ray intensity data representing stress in the test sample. A two-dimensional detection and storage arrangement (24) is arranged for detecting and storing the data representing stress in the test sample. A data processor (2) accesses the stored data from the two-dimensional detection and storage arrangement and processes the data representing stress in the test sample to determine stress in the test sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.