Substrate processing apparatus with small batch load lock
US6059507A · kind A · utility
85Cited by
15References
31Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 27, 1998 |
| Grant date | May 9, 2000 |
| Priority date | — |
| Expiry date | Mar 27, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/139
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A substrate load lock comprising a frame and a substrate support movably mounted to the frame. The frame forms at least three chambers. The substrate support has at least two separate support areas. The first one of the support areas is movable between the first one of the chambers. A second one of the support areas is movable between the second chamber and a third one of the chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.